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Home > Anterior Cervical Plating Systems > CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
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CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating
CVD Ald Atomic Layer Deposition System for Powder Coating Plating

CVD Ald Atomic Layer Deposition System for Powder Coating Plating

Customization: Available
After-sales Service: Onlin
Warranty: 1
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Product Description

Basic Information
Model NO.
CY-ALD
Type
Coating Production Line
Coating
Vacuum Coating
Certification
CE
Wafer Dimension
8 Inch and Below
Wafer Temp.
Rt-400c (Precision ±0.1c)
Background Vacuum
<5*10-3torr
Gas Carrier
N2 or Ar
Product Overview

CVD ALD Atomic Layer Deposition System is a high-precision single-wafer deposition system. It is specifically engineered for advanced scientific research and small-scale industrial experiments. This system is fully compliant with CE standards and is a cornerstone in fields like micro-electronics, nano-materials, and solar battery development.

  • ⚙
    Advanced Control: Integrated software for technological formulation, precise parameter setting, and real-time state supervisory control with interlocking alarms.
  • 🔬
    Superior Uniformity: Achieves deposition heterogeneity of less than ±1%, ensuring consistent film quality across the substrate.
Technical Parameters
Parameter Item Specifications
Wafer Dimension8 inch and below
Wafer TemperatureRT-400ºC, Controlling precision ±0.1ºC
Precursor LinesThree precursor lines (Optional more)
Precursor Line Temp.RT-200ºC, Controlling precision ±0.1ºC
Source Bottle Temp.RT-200ºC, Controlling precision ±0.1ºC
ALD Valve TypeSwagelok ALD swift valve
Growing ModeConsecutive or interval deposition mode
Power Supply50-60Hz, 220V/20A AC
Equipment Dimension600mm x 600mm x 1100mm
Application & Materials

Materials Capable of Deposition:

Nitride: TiN, SiN, AlN, TaN Oxide: TiO2, HfO2, SiO2, ZnO, Al2O3 Metals: Co, Cu, Ta, Ti, W, Pt, Ru Others: GaAs, InP, SrTiO3

Primary Fields:

  • High-k gate oxides & Storage capacitor dielectrics
  • Pinhole-free passivation layers for OLEDs
  • Conformal coatings for MEMS & Nanoporous structures
  • Optical thin-films and Solar battery research
Detailed Photos
ALD System 1
ALD System 2
ALD System 3
ALD System 4
ALD System 5
ALD System 6
Technical Layout Workshop
Certification 1
Certification 2
Frequently Asked Questions
Are you the manufacturer of this ALD system?
Yes, we are professional laboratory instrument manufacturers with a dedicated design team and production facility, ensuring optimal quality and competitive pricing.
What is the warranty and after-sales support policy?
We provide a 12-month warranty period and lifetime maintenance. Technical issues are addressed by our professional departments within 24 hours.
Can the instrument be customized to specific needs?
Absolutely. We offer customization services based on your research requirements. Customization typically takes 30-60 days depending on the specifications.
How do you handle different international power standards?
We supply transformers and plugs compliant with your local voltage and socket requirements (e.g., 110V/220V) to ensure ready-to-use operation.
What are the standard packaging and delivery methods?
All units are packed in standard export fumigation wooden boxes. Delivery is available via express, air, or sea shipping based on customer preference.
What is the typical lead time for standard models?
For goods in stock, delivery is usually 5-10 days. For non-stock standard items, the timeframe is adjusted based on the current production schedule.

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