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Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

Technical Specifications Overview
Model NO.
CY-MSP300S-3RF
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Sample Stage
Dia. 185mm
Heating Temp.
Max 500℃
Rotate Speed
1-20rpm Adjustable
Chamber
Stainless Steel
Package
Wooden Case
Vacuum Plating Thin Film Magnetron Sputtering PVD Systems
Magnetron Sputtering Coater Introduction

The Three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with three 300W RF power supply, which can be used for the preparation of non-metal materials. The three targets meet the needs of multi-layer or multiple coatings.

Equipped with two-channel high-precision mass flowmeter, it can be customized up to four channels to meet complex gas environment requirements. The instrument features advanced turbomolecular pump sets with an ultimate vacuum up to 1.0E-5Pa. Multiple solenoid valves control the gas path, allowing chamber access without shutting down the pump, significantly improving efficiency.

Key Applications:
Preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, and PTFE films. Ideal for laboratory material film preparation.
Technical Parameters
Module Specifications Detail
Sample Stage Size φ185mm Accuracy: ±1ºC
Heating Max 500ºC Rotate: 1-20rpm
Target Head Quantity 3 Heads (1", 2" optional) Water cooling mode
Chiller Circulating water chiller (10L/min)
Vacuum Chamber Size φ300mm × 300mm Material: Stainless Steel
Window φ100mm Top cover open mode
Gas Control Flowmeter 2 channels; 100sccm (Customizable)
Vacuum System Pump Type Molecular (600L/S) + Rotary Vane Ultimate Vacuum: 1.0E-5Pa
Performance Vacuum up to 1.0E-3Pa in 20 minutes
Interface KF40 / KF16 Compound vacuum gauge
Power Supply RF 300W × 3 Total Power: 2.5KW
Dimensions Overall Size 600 × 650 × 1280mm Weight: 300kg
Detailed Product Photos
Magnetron Sputtering System Main View
Internal Chamber View
Other Magnetron Sputtering Models
Sputtering Coater Model A
System Configuration
Laboratory Setup
Control Panel Details
Frequently Asked Questions
Are you a professional laboratory instrument manufacturer?
Yes, we are professional laboratory instrument manufacturers with our own design team and factory, ensuring high-quality products and technical expertise.
What is the warranty and after-sales service policy?
The product warranty period is 12 months with lifetime maintenance available. Our technical departments respond within 24 hours to resolve any issues.
How long is the delivery time for standard and customized instruments?
For in-stock goods, delivery is 5-10 days. Customized instruments typically take 30-60 days depending on the specific technical requirements.
Can you accommodate different power supply and plug standards?
Yes, we can supply transformers and plugs tailored to your local requirements and national power standards.
How are the goods packaged and what are the delivery methods?
We use standard export fumigation wooden box packaging. Shipping can be via Express, Air, or Sea according to your specific needs.
What payment methods are accepted?
We accept T/T, L/C, D/P and other standard secure payment methods for global trade.

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